PROTECTIVE CERAMIC/SAM (SELF-ASSEMBLED MONOLAYER) BILAYER COATINGS

Binghamton University
posted on 06/25/2009

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There is an urgent need for surface protection of silicon used in MEMS, as well as elimination of hermetic packaging. For this purpose, ceramic/organic bilayer coatings have been developed for silicon and organic surfaces through novel processing techniques and micro structural design to make them more reliable. Both organic and inorganic (ceramic) coatings have their own advantages and disadvantages due to their intrinsic materials properties and processing capabilities. Our bilayer coatings, consisting of top ceramic and underlying organic coatings, utilize the advantages of each individual coating layer while self-compensating for the weaknesses to promote a synergistic effect.

Provides organic (plastic) package protection from adverse environmental conditions without the need for hermetic encapsulation. Provides MEMS structures with protective coatings that eliminate the need for hermetic sealing. Bilayer coating approach provides for lower moisture/ion permeation, higher temperature capability, improved wear resistance, extended storage life, reduced surface contamination, reduced processing temperature, and significantly reduced cost of manufacture.