Microfabricated microconcentrator for sensors and gas chromatography
N J I T
posted on 06/30/2009
Devices for enhancing the sensitivity of a microsensor or any other micro device by providing on-line preconcentration. Microconcentrators that can be integrated with a sensor or a micromachined GC to enhance the signal to noise ratio can include a miniaturized sorbent trap fabricated on a microchip. The microconcentrator can be made on a silicon substrate so that a sensor can be integrated on the same chip. The microconcentrator is composed of at least one microchannel lined with a microheater for in-situ heating. Preconcentration may be achieved on a thin-film polymeric layer deposited above the heater in the microchannel. Rapid heating by the channel heater generates a “desorption pulse” to be injected into a detector or a sensor.
File Number: 02-004
Other Information:
96/101 ; 204/192.1; 205/640;
205/666; 73/23.35; 73/23.41;
95/115; 95/82; 95/87; 96/102;
96/143; 96/146
| Patent Number(s): | 7147695 |
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