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Piezoelectric multiple degree of freedom actuator
N J I T
posted on 06/30/2009
A piezoelectric actuator that is capable of providing up to six degrees of positioning freedom. Specifically, the piezoelectric actuator is capable of providing positioning freedom in three linear directions (x, y, z) and three rotary angles (.phi., .theta., .psi.). The piezoelectric actuator typically comprises a plurality of unit cells stacked on top of one another. Each unit cell comprises a base plate, a cruciform base, and a stack of piezoelectric plates. The base plate is used to support the cruciform base. The cruciform base comprises a piezoelectric cruciform-shaped body, a
plurality of electrodes formed on the top surface of the cruciform-shaped body, and a ground plane formed on the bottom surface of the cruciform-shaped body. Each piezoelectric plate in the stack of piezoelectric plates comprises a piezoelectric plate body, a plurality of electrodes formed on the top surface of the plate body, and a ground plane formed on the bottom surface of the plate body. The piezoelectric plates are bonded together and to the cruciform base. Motion (linear or angular) is generated by applying suitable drive voltages to the electrodes.
File Number: 95-007 CON
Other Information:
310/328; 310/330; 310/331;
310/367
| Patent Number(s): | 6359370 |
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Principal Investigator:
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Timothy Chang
Innovations (4) Publications (1) |
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Case Manager:
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Office of Technology Development
Innovations (49) |
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