Improved MEMS, Self-Powered, Wireless AC Electricity Sensors

University of California System: University of California, Berkeley
posted on 06/25/2010

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Growing public awareness of energy issues indicates a latent demand for consumer as well as industrial scale products that monitor and manage energy use and efficiency across the grid from residential and industrial buildings, to power distribution and transmission lines. This latent demand could be addressed by the latest advances in micro-electrical mechanical system (MEMS) sensors technology, wireless radios, and energy scavenging. UC Berkeley researchers have addressed this market opportunity by leveraging the technology advancements to develop improved MEMS AC electricity sensors. These Berkeley sensors are self-powered and wirelessly networked. They can be used to establish ubiquitous networks of electricity sensors thereby enabling smart grids for energy monitoring as well as management application such as demand response.

AC electricity sensing across the grid including within residences, offices and factories as well as on residential wiring, distribution cables and transmission lines. Applications include real-time power monitoring, electricity demand response management, and other power-aware solutions. These MEMS nodes could be augmented with MEMS sensors that measure other environmental parameters such as carbon dioxide and airborne particulates.

• Low cost via CMOS batch fabrication;
• Easy to install as doesn’t require contact or encircling of the conductor;
• East to maintain as doesn’t require battery replacement;
• Self powered via energy scavenging;
• Wireless communication for network connectivity;
• Small size and low weight;
• Other MEMS environmental sensors could be integrated;
• Hermetically sealed construction for rugged outdoor applications;