Micromachined Tuning Fork Gyroscopes With Ultra-High Sensitivity And Shock Rejection
University of California System: University of California, Irvine
posted on 05/23/2011
University researchers have designed a family of new dual mass and quadruple mass tuning fork architectures addressing the limitations of the conventional designs. In the dual mass design, the spurious in-phase drive-mode is shifted above the operational frequency to improve the response characteristics.
These new ultra-high resolution tuning fork gyroscope architectures provide a path to silicon MEMS-based gyrocompassing and inertial navigation systems.
Unlike conventional tuning fork gyroscopes, the proposed architecture prioritizes the quality factor of the sense-mode by mechanical design, where the linearly coupled anti-phase sense-mode is balanced in both the linear momentum as well as moment of reaction forces (torque) in order to minimize dissipation of energy through the substrate and enable ultra-high mechanical sensitivity to the input angular rate.
The second, quadruple mass design builds upon the dual mass architecture by coupling together two dual mass devices to achieve completely symmetric, mode-matched mechanical structure with ultra-high quality factor in both the drive- and the sense-mode. The quadruple mass design of the sensor element preserves the ultra-high sensitivity of the dual mass design. At the same time, the quadruple mass design provides complete mechanical rejection of external vibrations and shocks along both drive and sense axes, and improved robustness to fabrication imperfections and temperature induced frequency drifts.
File Number: 19585
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